Critical semiconductor process steps rely on a vacuum and abatement system which must always be available, as it’s very rarely switched off. The system is heavily connected to process tool efficiency, so it must deliver the best possible performance.
In this web cast Erik Collart examines how customers are using data to improve effectiveness of the SubFab, reduce the maintenance effort and avoid unplanned downtime.
10 Minute Web Cast: Data – Who Cares? Turning data into actionable insight.