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Gif showing a vacuum pump in augmented reality

Evaluating vacuum and abatement service maturity

Fast and flexible operations from the clean room to the SubFab are propelling customers’ ambitious growth targets, but how does this translate to the maintenance approach for the vacuum and abatement system?

To help semiconductor manufacturers assess their own approach to maintenance, the key characteristics of each maintenance level are outlined in this service maturity infographic.

The infographic is an excerpt from the recent Silicon Semiconductor article “Evaluating the Fab Lifecycle and SubFab service maturity model: Is there more to gain? View article.

Infographic of the service maturity model