VSS video
VSS - Core service plans
VSS - Advanced service plans
VSS - Upgrades service plans
IH article - Evaluating vacuum and abatement service maturity - download material
The infographic is an excerpt from the recent Silicon Semiconductor article “Evaluating the Fab Lifecycle and SubFab service maturity model: Is there more to gain?
IH article - how much do spend on downtime - download material
To read more on this subject, download Erik Collart’s article ‘Cost Comparison of Maintenance Regimes’, below.
IH article - how is vacuum changing the subfab - download material
