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Improve tool availability and yield. Eliminate risk in the smart SubFab

Why the SubFab?

Wafer output, yield, uptime, and most importantly safety are critical success factors of the semiconductor fab. Although the SubFab is recognised as a contributor to success, it is unlike the highly automated clean room: it is a harsh and complex environment where people interact closely with machines and processes.

Smart Manufacturing is seen as a way to improve effectiveness, but if the focus is too much on IOT technology, environments like the SubFab can’t support the success of the wider fab. Our approach is to reduce risk and uncertainty and create value by connecting machines, people and processes to fab objectives. This approach is what we call Operational Excellence. 

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A guide to operational excellence

Learn more about Edwards’ approach to enabling Smart Manufacturing in the SubFab.